621.38152  / Y8s <br/>
Yoo, Chue San <br/>
       Semiconductor manufacturing technology 
 / Chue San Yoo 
 .- New Jersey: World Scientific,  2008 
 .- xii, 470p . 
.- ( Advanced Series In Electrical And Computer Engineering / Edited By W.K. Chen  V.13   
<br><u>ISBN:</u> 9789812568236 
<br/><u>Subject Headings:</u> <br/>Semiconductor;
<br><U>Copy Details:</u><br> Acc. No.: <b>A168550</b>, Full Call No.: 621.38152 Y8s,   Item type:  Books , Location: General Stacks, <br><b>------------------------- --------------------- ------ --------- ------- ------- --------- -------- </b><br>