621.381 / L626
LIGA and its applications
/ edited by Volker Saile...[et al.]
.- Weinheim: Wiley-Vch Verlag, 2009
.- x,479p .
.- ( Advanced Micro And Nanosystems / Edited By O. Brand V.7
ISBN: 9783527316984
Subject Headings:
Microelectromechanical systems;
Author Added Entry:
Saile, Volker, Ed.;
Copy Details:
Acc. No.: A164530, Full Call No.: 621.381 L626, Item type: Books , Location: COMPACT STORAGE (BASEMENT),
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