670.42  / M583 <br/>
<br/>
       Micro process engineering : fundamentals, devices, fabrication, and applications 
 / edited by Norbert Kockman 
 .- Weinheim: Wiley-Vch,  2006 
 .- xxii, 507p. . 
.- ( Advanced Micro And Nanosystems  V.5   
<br><u>ISBN:</u> 9783527312467 
<br/><u>Subject Headings:</u> <br/>Product Engineering;
<br/><U>Author Added Entry: </u><br/>Kockman, Norbert,Ed.;
<br><U>Copy Details:</u><br> Acc. No.: <b>A162364</b>, Full Call No.: 670.42 M583, (v.5)  Item type:  Books , Location: General Stacks, <br><b>------------------------- --------------------- ------ --------- ------- ------- --------- -------- </b><br>