621.381  / H859m2 <br/>
Hsu, Tai-Ran <br/>
       MEMS and  microsystems : design, manufacture and nanoscale engineering 
 / Tai-Ran Hsu 
 .- 2nd ed. 
 .- New Jersey: John Wiley,  2008 
 .- xxv, 550p. . 
<br><u>ISBN:</u> 9780470083017 
<br/><u>Subject Headings:</u> <br/>Microelectronics;
<br><U>Copy Details:</u><br> Acc. No.: <b>A161984</b>, Full Call No.: 621.381 H859m2,   Item type:  Books , Location: General Stacks, <br><b>------------------------- --------------------- ------ --------- ------- ------- --------- -------- </b><br>