620.5  / M583L <br/>
Leondes,Cornelius T. <br/>
       MEMS/NEMS 
 / HANDBOOK TECHNIQUES AND APPLICATIONS 
 .-  Springer Science+Business Media Inc., New York,  2006 
 .- xviii,380 . 
<br/>Contents : V. 1. Design Methods -- V. 2. Fabrication Techniques -- V. 3. Manufacturing Methods -- V. 4. Sensors And Actuators -- V. 5. Medical Applications And Moems 
<br><u>ISBN:</u> 0387245200 
<br/><u>Subject Headings:</u> <br/>Microelectromechanical Systems -- Design And Construction;<br/>Nanotechnology;
<br><U>Copy Details:</u><br> Acc. No.: <b>A157268</b>, Full Call No.: 620.5 M583L,   Item type:  Books , Location: COMPACT STORAGE (BASEMENT), <br><b>------------------------- --------------------- ------ --------- ------- ------- --------- -------- </b><br>