621.3  / L74F <br/>
Liu,Chang <br/>
       FOUNDATIONS OF MEMS 
 / 
 .-  Pearson Education,New Jersey,  2006 
 .- xxii,530 . 
<br><u>ISBN:</u> 013199204X 
<br/><u>Subject Headings:</u> <br/>Microelectromechanical Systems;
<br><U>Copy Details:</u><br> Acc. No.: <b>A154008</b>, Full Call No.: 621.3 L74F,   Item type:  Books , Location: General Stacks, <br><b>------------------------- --------------------- ------ --------- ------- ------- --------- -------- </b><br>