621.381  / B22A <br/>
Bao,Minhang <br/>
       ANALYSIS AND DESIGN PRINCIPLES OF MEMS DEVICES 
 / 
 .-  Elsevier,Amsterdam,  2005 
 .- xii,312 . 
<br><u>ISBN:</u> 0 444 51616 6 
<br/><u>Subject Headings:</u> <br/>Mems;<br/>Microelectromechanical Systems Devices;
<br><U>Copy Details:</u><br> Acc. No.: <b>A152431</b>, Full Call No.: 621.381 B22A,   Item type:  Books , Location: General Stacks, <br><b>------------------------- --------------------- ------ --------- ------- ------- --------- -------- </b><br>