621.381  / EL25S <br/>
Setter,Nava <br/>
       Electroceramic-Based Mems : fabrication-technology and applications  
 / 
 .-  Springer-Verlag, New York,  2005 
 .- xii,414 . 
<br><u>ISBN:</u> 0387233105 
<br/><u>Subject Headings:</u> <br/>Microelectromechanical Systems;
<br><U>Copy Details:</u><br> Acc. No.: <b>A152548</b>, Full Call No.: 621.381 EL25S,   Item type:  Text Books , Location: TEXT, <br><b>------------------------- --------------------- ------ --------- ------- ------- --------- -------- </b><br>