621.381  / M519 <br/>
Janson,Siegfried W <br/>
       MEMS/MOEMS COMPONENTS AND THEIR APPLICATIONS 
 / 
 .-  Spie-The International Soc. For Optical Engg., Washington,  2004 
 .- xxxi,232 . 
.- ( Proceedings Of Spie--The International Society For Optical Engineering     
<br/>Sponsored By Spie-The International Society For Optical Engineering Includes Index 
<br><u>ISBN:</u> 0819452521 
<br/><u>Subject Headings:</u> <br/>Microelectromechanical Systems--Congresses;<br/>Optoelectronic Devices--Congresses;
<br/><U>Author Added Entry: </u><br/>Henning,Albert K;
<br><U>Copy Details:</u><br> Acc. No.: <b>A150778</b>, Full Call No.: 621.381 M519,   Item type:  Books , Location: General Stacks, <br><b>------------------------- --------------------- ------ --------- ------- ------- --------- -------- </b><br>