621.3  / F857I <br/>
Franssila, Sami <br/>
       Introduction to microfabrication 
 / Sami Franssila 
 .- Chichester: John Wiley & Sons,  2004 
 .- xvii, 401p . 
<br><u>ISBN:</u> 0470851066 
<br/><u>Subject Headings:</u> <br/>Microelectromechanical systems;<br/>Electronic apparatus and appliances;<br/>Microfabrication;
<br><U>Copy Details:</u><br> Acc. No.: <b>A149770</b>, Full Call No.: 621.3 F857I,   Item type:  Text Books , Location: TEXT, <br><b>------------------------- --------------------- ------ --------- ------- ------- --------- -------- </b><br>