621.3815  / C62 <br/>
Brand,O. <br/>
       CMOS-MEMS 
 / 
 .-  Wiley-Vch, Weinheim,  2005 
 .- xiv,594 . 
.- ( Advanced Micro & Nanosystems     
<br><u>ISBN:</u> 3527310800 
<br/><u>Subject Headings:</u> <br/>Metal Oxide Semiconductors, Complementary;<br/>Microelectromechanical Systems;
<br/><U>Author Added Entry: </u><br/>Fedder,G. K.;
<br><U>Copy Details:</u><br> Acc. No.: <b>A151623</b>, Full Call No.: 621.3815 C62,   Item type:  Books , Location: General Stacks, <br><b>------------------------- --------------------- ------ --------- ------- ------- --------- -------- </b><br>