621.38152  / W269T <br/>
Wasa,Kiyotaka,Kitabatake,Makoto <br/>
       THIN FLIM MATERIALS TECHNOLOGY 
 / SPUTTERING OF COMPOUND MATERIALS 
 .-  William Andrew Pub., Norwich, Ny,  2004 
 .- xiv,518 . 
<br><u>ISBN:</u> 0815514832 
<br/><u>Subject Headings:</u> <br/>Cathode Sputtering (Planing Process);<br/>Thin Films;
<br/><U>Author Added Entry: </u><br/>Adachi,Hideaki;
<br><U>Copy Details:</u><br> Acc. No.: <b>A149502</b>, Full Call No.: 621.38152 W269T,   Item type:  Books , Location: General Stacks, <br><b>------------------------- --------------------- ------ --------- ------- ------- --------- -------- </b><br>