621.38152  / K837p <br/>
Konuma, Mitsuharu <br/>
       Plasma techniques for film deposition 
 / by Mitsuharu Konuma 
 .- Harrow: Alpha Science International Ltd.,  2005 
 .- ix, 337p. 
<br><u>ISBN:</u> 184265151X 
<br/><u>Subject Headings:</u> <br/>Thin Films;<br/>Plasma-Enhanced Chemical Vapor Deposition;
<br><U>Copy Details:</u><br> Acc. No.: <b>A155878</b>, Full Call No.: 621.38152 K837p,   Item type:  Books , Location: COMPACT STORAGE (BASEMENT), <br><b>------------------------- --------------------- ------ --------- ------- ------- --------- -------- </b><br>