621.044 / M289P
Makabe,T.
PLASMA ELECTRONICS
/ APPLICATIONS IN MICROELECTRONIC DEVICE FABRICATION
.- Taylor & Francis, New York, 2006
.- 339 .
.- ( Series In Plasma Physics
ISBN: 0750309768
Subject Headings:
Plasma Engineering;
Author Added Entry:
Petrovic,Z.;
Copy Details:
Acc. No.: A155533, Full Call No.: 621.044 M289P, Item type: Books , Location: General Stacks,
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