621.381  / L98M <br/>
Lyshevski,Sergey Edward <br/>
       MEMS AND NEMS 
 / SYSTEMS, DEVICES, AND STRUCTURES 
 .-  Crc Press, Boca Raton,  2002 
 .- 461 . 
<br><u>ISBN:</u> 0849312620 
<br/><u>Subject Headings:</u> <br/>Microelectromechanical Systems;
<br><U>Copy Details:</u><br> Acc. No.: <b>A142150</b>, Full Call No.: 621.381 L98M,   Item type:  Books , Location: General Stacks, <br><b>------------------------- --------------------- ------ --------- ------- ------- --------- -------- </b><br>