530.044 / AD95
T Makabe,No
ADVANCES IN LOW TEMPERATURE RF PLASMAS
/ BASIS FOR PROCESS DESIGN
.- Elsevier, Amsterdam, c2002
.- xii,341 .
ISBN: 0444510958
Subject Headings:
Low Temperature Plasmas -- Industrial Applications;
Author Added Entry:
Makabe,T;
Copy Details:
Acc. No.: A141744, Full Call No.: 530.044 AD95, Item type: Books , Location: COMPACT STORAGE (BASEMENT),
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