621.381 / Se59m
Senturia, Stephen D.
       Microsystem design / Stephen D. Senturia .- Boston: Kluwer Academic Publishers, 2001 .- xix, 689p. .
ISBN: 0792372468
Subject Headings:
Microelectromechanical Systems--Design And Construction;
System Design;
Copy Details:
Acc. No.: A140068, Full Call No.: 621.381 Se59m, Item type: Books , Location: General Stacks,
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