660.02  / M691H <br/>
Misra,Ashutosh,Hogan,Jeremiah D. <br/>
       HANDBOOK OF CHEMICALS AND GASES FOR THE SEMICONDUCTOR INDUSTRY 
 / 
 .-  John Wiley, New York,  c2002 
 .- xiii,363 . 
<br/>Includes Index 
<br><u>ISBN:</u> 0471316717 
<br/><u>Subject Headings:</u> <br/>Chemicals -- Handbook, Manuals, Etc;<br/>Semiconductors -- Materials -- Handbooks, Manuals, Etc;
<br/><U>Author Added Entry: </u><br/>Chorush,Russell;
<br><U>Copy Details:</u><br> Acc. No.: <b>A141739</b>, Full Call No.: 660.02 M691H,   Item type:  Books , Location: COMPACT STORAGE (BASEMENT), <br><b>------------------------- --------------------- ------ --------- ------- ------- --------- -------- </b><br>