621.38172 / H191s2
HANDBOOK OF THIN-FILM DEPOSITION PROCESSES AND TECHNIQUES : PRINCIPLES, METHODS, EQUIPMENT AND APPLICATIONS
/ edited by Krishna Seshan
.- New York: Noyes Publications/William Andrew Pub, 2002
.- xxviii, 629p .
ISBN: 0815514425
Subject Headings:
Thin Film Devices -- Design and construction -- Handbook, manuals, etc.;
Author Added Entry:
Seshan, Krishna [ed.];
Copy Details:
Acc. No.: A136411, Full Call No.: 621.38172 H191s2, Item type: Books , Location: General Stacks,
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