621.044 / C426
Cheung,Kin P.
PLASMA CHARGING DAMAGE.
/
.- Springer-Verlag, London, 2001
.- xii,346 .
ISBN: 1852331445
Subject Headings:
Semicoductors -- Effect Of Radiation On;
Metal Oxide Semiconductors -- Defects;
Plasma Radiation;
Copy Details:
Acc. No.: A138135, Full Call No.: 621.044 C426, Item type: Books , Location: General Stacks,
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