681.2  / EL87m <br/>
Elwenspoek, M. <br/>
       MECHANICAL MICROSENSORS 
 / 
 .- Berlin: Springer-Verlag, ,  2001 
 .- x, 295p . 
<br><u>ISBN:</u> 3540675825 
<br/><u>Subject Headings:</u> <br/>Detectors -- Design And Constructions;<br/>Microelectromechanical Systems -- Design And Construction;<br/>Tranducers;
<br/><U>Author Added Entry: </u><br/>Wiegerink, R.;
<br><U>Copy Details:</u><br> Acc. No.: <b>A134064</b>, Full Call No.: 681.2 EL87M,   Item type:  Books , Location: General Stacks, <br><b>------------------------- --------------------- ------ --------- ------- ------- --------- -------- </b><br>