621.044  / H192S <br/>
R. J. Shul,S. J. Pearton <br/>
       HANDBOOK OF ADVANCED PLASMA PROCESSING TECHNIQUES 
 / 
 .-  Springer-Verlag, Berlin,  2000 
 .- xvi,653 . 
<br><u>ISBN:</u> 3540667725 
<br/><u>Subject Headings:</u> <br/>Plasma Engineering;<br/>Electronic Circuits -- Design And Construction;<br/>Plasma Etching;
<br/><U>Author Added Entry: </u><br/>Pearton,S. J.;
<br><U>Copy Details:</u><br> Acc. No.: <b>A132279</b>, Full Call No.: 621.044 H192S,   Item type:  Books , Location: General Stacks, <br><b>------------------------- --------------------- ------ --------- ------- ------- --------- -------- </b><br>