621.38152  / H637P <br/>
Hitchon,W. N.G. <br/>
       PLASMA PROCESSES FOR SEMICONDUCTOR FABRICATION 
 / 
 .-  Cambridge Univ. Press, Cambridge,  1999 
 .- ix,221 . 
.- ( Cambridge Studies In Semiconductor Physics And Microelectronic Engineering     
<br/>Includes Bibliographical References And Index 
<br><u>ISBN:</u> 0521591759 
<br/><u>Subject Headings:</u> <br/>Semiconductors -- Ething;<br/>Plasma Ething;
<br><U>Copy Details:</u><br> Acc. No.: <b>A128874</b>, Full Call No.: 621.38152 H637P,   Item type:  Books , Location: General Stacks, <br><b>------------------------- --------------------- ------ --------- ------- ------- --------- -------- </b><br>