670 / H192r
HANDBOOK OF MICROLITHOGRAPHY, MICROMACHINING, AND MICROFABRICATION : MICROLITHOGRAPHY
/ edited by P. Rai-Choudhury
.- Bellingham: Spie-Optical Engineering Press, 1997
.- vii, 768p .
Includes Bibliographical References And Index
ISBN: 0852969066
Subject Headings:
Microlithography;
Micromachining;
Microfabrication;
Author Added Entry:
Rai-Choudhury, P. [ed.];
Copy Details:
Acc. No.: A126116, Full Call No.: 670 H192R, Item type: Books , Location: General Stacks,
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