621.38152 / P695
Giovanni No Bruno,Pio No Capezzuto,Arun No Madan
       PLASMA DEPOSITION OF AMORPHOUS SILICON-BASED MATERIALS / .- Academic Press, Boston, 1995 .- xi,324 . .- ( Plasma-Materials Interactions
ISBN: 012137940X
Subject Headings:
Amorphous Semiconductors -- Design And Construction;
Silicon Alloys;
Plasma-Enhanced Chemical Vapor Deposition;
Author Added Entry:
Madan,Arun;
Copy Details:
Acc. No.: A123102, Full Call No.: 621.38152 P695, Item type: Books , Location: General Stacks,
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