530.4175 / M72R
Stephen Rossnagel
MODELLING OF FILM DEPOSITION FOR MICROELECTRONIC APPLICATIONS
/
.- Academic Press, San Diego, c1996
.- xiv,291 .
.- ( Thin Films V.22
Includes Bibliographical References And Index
ISBN: 0125330227
Subject Headings:
Surfaces (Technology);
Author Added Entry:
Rossnagel,Stephen;
Copy Details:
Acc. No.: A122746, Full Call No.: 530.4175 M72R, Item type: Books , Location: COMPACT STORAGE (BASEMENT),
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