621.381 / M583
Hess, Dennis W.
MICROELECTRONICS PROCESSING
/ CHEMICAL ENGINEERING ASPECTS
.- Washington, D. C.: American Chemical Society, 1989
.- xiv,547 .
.- ( Advances In Chemistry Series No. 221
ISBN: 0841214751
Subject Headings:
Microelectronics -- Materials;
Integrated Circuits -- Design And Construction;
Surface Chemistry;
Author Added Entry:
Jensen, Klavs F.;
Copy Details:
Acc. No.: A107140, Full Call No.: 621.381 M583, Item type: Books , Location: COMPACT STORAGE (BASEMENT),
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