621.38152  / L967h <br/>
Luft, Werner <br/>
       HYDROGENATED AMORPHOUS SILICON ALLOY DEPOSITION PROCESSES 
 / 
 .- New York: Marcel Dekker,  c1993 
 .- xiv,327 . 
.- ( Applied Physics Series  V. 1   
<br/>Includes Bibliographical References And Index 
<br><u>ISBN:</u> 0824791460 
<br/><u>Subject Headings:</u> <br/>Thin Films -- Electric Properties;<br/>Silicon Alloys;
<br/><U>Author Added Entry: </u><br/>Tsuo, Y. Simon;
<br><U>Copy Details:</u><br> Acc. No.: <b>A116742</b>, Full Call No.: 621.38152 L967h,   Item type:  Books , Location: COMPACT STORAGE (BASEMENT), <br><b>------------------------- --------------------- ------ --------- ------- ------- --------- -------- </b><br>