621.692  / D956h <br/>
Duval, Pierre <br/>
       HIGH VACUUM PRODUCTION IN THE MICROELECTRONICS INDUSTRY 
 / 
 .- Amsterdam: Elsevier,  1988 
 .- xiii,222 . 
.- ( Plasma Technology  V. 2   
<br><u>ISBN:</u> 044442878X 
<br/><u>Subject Headings:</u> <br/>Vacuum Technology;<br/>Microelectronics;
<br><U>Copy Details:</u><br> Acc. No.: <b>A102341</b>, Full Call No.: 621.692 D956h,   Item type:  Books , Location: COMPACT STORAGE (BASEMENT), <br><b>------------------------- --------------------- ------ --------- ------- ------- --------- -------- </b><br>