537.52  / C366g <br/>
Chapman, Brian <br/>
       GLOW DISCHARGE PROCESSES 
 / SPUTTERING AND PLASMA ETCHING 
 .- New York: Wiley,  1980 
 .- xv,406 . 
<br><u>ISBN:</u> 047107828X 
<br/><u>Subject Headings:</u> <br/>Sputtering (Physics);<br/>Glow Discharges;
<br><U>Copy Details:</u><br> Acc. No.: <b>A103083</b>, Full Call No.: 537.52 C366g,   Item type:  Books , Location: General Stacks, <br><b>------------------------- --------------------- ------ --------- ------- ------- --------- -------- </b><br>