621.366  / B692L <br/>
Boyd, Ian W. <br/>
       LASER PROCESSING OF THIN FILMS AND MICROSTRUCTURES 
 / OXIDATION, DEPOSITION AND ETCHING OF INSULATORS 
 .- Amsterdam: Ios,  1987 
 .- viii,320 . 
.- ( Springer Series In Materials Science/Ed. Mooradian, Aram  V. 3   
<br><u>ISBN:</u> 3540179518 
<br/><u>Subject Headings:</u> <br/>Lasers -- Industrial Applications;<br/>Thin Films;<br/>Microstructure;
<br><U>Copy Details:</u><br> Acc. No.: <b>A103560</b>, Full Call No.: 621.366 B692L,   Item type:  Books , Location: COMPACT STORAGE (BASEMENT), <br><b>------------------------- --------------------- ------ --------- ------- ------- --------- -------- </b><br>