621.3817  / D847 <br/>
Powell, Ronald A. <br/>
       DRY ETCHING FOR MICROELECTRONICS 
 / 
 .- Amsterdam: North-Holland,  1984 
 .- xi,299 . 
.- ( Materials Processing Theory And Practices  V. 4   
<br/>Bibliography : P. 223-294 
<br/><u>Subject Headings:</u> <br/>Semiconductors -- Etching;<br/>Microelectronics;
<br><U>Copy Details:</u><br> Acc. No.: <b>A85124</b>, Full Call No.: 621.3817 D847,   Item type:  Books , Location: COMPACT STORAGE (BASEMENT), <br><b>------------------------- --------------------- ------ --------- ------- ------- --------- -------- </b><br>