621.3817  / B784p <br/>
Brodie, Ivor <br/>
       PHYSICS OF MICROFABRICATION 
 / 
 .- New York: Plenum Press,  1982 
 .- xix,503 . 
<br/><u>Subject Headings:</u> <br/>Microelectronics;<br/>Thinfilm Circuits;
<br/><U>Author Added Entry: </u><br/>Muray, Julius J.;
<br><U>Copy Details:</u><br> Acc. No.: <b>A80470</b>, Full Call No.: 621.3817 B784p,   Item type:  Books , Location: General Stacks, <br><b>------------------------- --------------------- ------ --------- ------- ------- --------- -------- </b><br>