621.381 / H191
Milek, John T.
SILICON NITRIDE FOR MICROELECTRONIC APPLICATIONS
/
.- New York: Ifi/Plenum, 1971
.- v.2 .
.- ( Handbook Of Electronic Materials V. 3
Contents. -- Pt. 1. Preparation And Properties -- Pt. 2. Applications And Devices
Subject Headings:
Silicon Nitride;
Semiconductors;
Electronics -- Materials;
Copy Details:
Acc. No.: A32959, Full Call No.: 621.381 H191, (v. 6) Item type: Books , Location: COMPACT STORAGE (BASEMENT),
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