CMOS past, present and future
Contributor(s): Radamson, Henry H | Luo, Jun | Simoen, Eddy | Zhao, Chao.
Series: Woodhead publishing series in electronic and optical materials. Publisher: Duxford Woodhead Publishing 2018Description: vii, 263p.ISBN: 9780081021392.Subject(s): Semiconductors | Metal oxide semiconductors, ComplementaryDDC classification: 537.6 | C738 Summary: CMOS Past, Present and Future provides insight from the basics, to the state-of-the-art of CMOS processing and electrical characterization, including the integration of Group IV semiconductors-based photonics. The book goes into the pitfalls and opportunities associated with the use of hetero-epitaxy on silicon with strain engineering and the integration of photonics and high-mobility channels on a silicon platform. It begins with the basic definitions and equations, but extends to present technologies and challenges, creating a roadmap on the origins of the technology and its evolution to the present, along with a vision for future trends. The book examines the challenges and opportunities that materials beyond silicon provide, including a close look at high-k materials and metal gate, strain engineering, channel material and mobility, and contacts. The book's key approach is on characterizations, device processing and electrical measurements.Item type | Current location | Collection | Call number | Status | Date due | Barcode | Item holds |
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Books | PK Kelkar Library, IIT Kanpur | General Stacks | 537.6 C738 (Browse shelf) | Available | A183752 |
CMOS Past, Present and Future provides insight from the basics, to the state-of-the-art of CMOS processing and electrical characterization, including the integration of Group IV semiconductors-based photonics. The book goes into the pitfalls and opportunities associated with the use of hetero-epitaxy on silicon with strain engineering and the integration of photonics and high-mobility channels on a silicon platform. It begins with the basic definitions and equations, but extends to present technologies and challenges, creating a roadmap on the origins of the technology and its evolution to the present, along with a vision for future trends.
The book examines the challenges and opportunities that materials beyond silicon provide, including a close look at high-k materials and metal gate, strain engineering, channel material and mobility, and contacts. The book's key approach is on characterizations, device processing and electrical measurements.
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