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Silicon processing for the VLSI ERA [v.2]

By: Wolf, Stanley.
Material type: materialTypeLabelBookPublisher: California Lattice Press 2000Description: xxxvi, 890p.Subject(s): Silicon | Integrated circuits -- Very large scale information | Semiconductors -- EtchingDDC classification: 621.38173 | W831s2
Contents:
Contents:v.1. Process integration
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Item type Current location Collection Call number Copy number Status Date due Barcode Item holds
Books Books PK Kelkar Library, IIT Kanpur
General Stacks 621.38173 W831s2 (Browse shelf) v.2 Available A177277
Total holds: 0

Contents:v.1. Process integration

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