MEMS/NEMS
By: Leondes,Cornelius T.
Material type: BookPublisher: Springer Science+Business Media Inc., New York 2006Description: xviii,380.ISBN: 0387245200.Subject(s): Microelectromechanical Systems -- Design And Construction | NanotechnologyDDC classification: 620.5 | M583LItem type | Current location | Collection | Call number | url | Status | Date due | Barcode | Item holds |
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Books | PK Kelkar Library, IIT Kanpur | COMPACT STORAGE (BASEMENT) | 620.5 M583L (Browse shelf) | Book Request | Available | A157265 |
Total holds: 0
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620.5 K131m Micro/Nano replication | 620.5 K55d Dynamical symmetries for nanostructures | 620.5 L96n Nanocasting | 620.5 M583L MEMS/NEMS | 620.5 M583L MEMS/NEMS | 620.5 M583L MEMS/NEMS | 620.5 M583L MEMS/NEMS |
Contents : V. 1. Design Methods -- V. 2. Fabrication Techniques -- V. 3. Manufacturing Methods -- V. 4. Sensors And Actuators -- V. 5. Medical Applications And Moems
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