PVD FOR MICROELECTRONICS
By: Powell,Ronald A.
Contributor(s): Rossnagel,Stephen M.
Material type: BookSeries: Thin Films. Publisher: Academic Press, San Diego c1999Description: xiii,419.ISBN: 012533026X.Subject(s): Thin Film Devices -- Design And Construction | Vapor-Plating | Thin FilmsDDC classification: 621.38152 | P871PItem type | Current location | Collection | Call number | Status | Date due | Barcode | Item holds |
---|---|---|---|---|---|---|---|
Books | PK Kelkar Library, IIT Kanpur | General Stacks | 621.38152 P871P (Browse shelf) | Available | A131810 |
Total holds: 0
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