SILICON MICROMACHINING
By: Elwenspoek,M.
Contributor(s): Jansen,H V.
Material type:
BookSeries: Cambridge Studies In Semiconductor Physics And Microelectronic Engineering. Publisher: Cambridge Univ. Press, Cambridge 1998Description: xiii,405.ISBN: 052159054X.Subject(s): Silicon | Micromachining | EtchingDDC classification: 621.3815 | EL87S
| Item type | Current location | Collection | Call number | Status | Date due | Barcode | Item holds |
|---|---|---|---|---|---|---|---|
Books
|
PK Kelkar Library, IIT Kanpur | General Stacks | 621.3815 EL87S (Browse shelf) | Available | A130019 |
Total holds: 0
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