MICROLITHOGRAPHY FUNDAMENTALS IN SEMICONDUCTOR DEVICES AND FABRICATION TECHNOLOGY
By: Nonogaki,Saburo, Ueno,Takumi.
Contributor(s): Ito,Toshio.
Material type:
BookPublisher: Marcel Dekker, New York 1998Description: iv,327.ISBN: 0824799518.Subject(s): Semiconductors -- Design And Construction | Microlithography -- Industrial ApplicationDDC classification: 621.38152 | N733M
| Item type | Current location | Collection | Call number | Status | Date due | Barcode | Item holds |
|---|---|---|---|---|---|---|---|
Books
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PK Kelkar Library, IIT Kanpur | General Stacks | 621.38152 N733M (Browse shelf) | Available | A126689 |
Total holds: 0
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| 621.38152 N638 NITRIDE SEMICONDUCTOR DEVICES | 621.38152 N638 Nitride semiconductor devices | 621.38152 N73 NON-EQUILIBRIUM DYNAMICS OF SEMICONDUCTORS AND NANOSTRUCTURES | 621.38152 N733M MICROLITHOGRAPHY FUNDAMENTALS IN SEMICONDUCTOR DEVICES AND FABRICATION TECHNOLOGY | 621.38152 OP7 OPTICS OF QUANTUM DOTS AND WIRES | 621.38152 OR5H HIGH RESOLUTION FOCUSED ION BEAMS | 621.38152 Or8e The electrical characterization of semiconductors |
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