| 000 -LEADER |
|---|
| fixed length control field |
01109nam a22002657a 4500 |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20200811165124.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
200623b xxu||||| |||| 00| 0 eng d |
| 022 ## - INTERNATIONAL STANDARD SERIAL NUMBER |
|---|
| ISSN |
1520-295X |
| 040 ## - CATALOGING SOURCE |
|---|
| Transcribing agency |
IIT Kanpur |
| 041 ## - LANGUAGE CODE |
|---|
| Language code of text/sound track or separate title |
eng |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
624.1762 |
| 245 ## - TITLE STATEMENT |
|---|
| Title |
Development of measurement capability for micro-vibration evaluation with application to chip fabrication facilities |
| Statement of responsibility, etc |
G. C. Lee ...[et al.] |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) |
|---|
| Place of publication |
Buffalo, New York |
| Name of publisher |
Multidisciplinary Center for Earthquake Engineering Research, University at Buffalo |
| Year of publication |
1999 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Number of Pages |
xiii, 129p |
| 440 ## - SERIES STATEMENT/ADDED ENTRY--TITLE |
|---|
| Title |
Technical report Multidisciplinary Center for Earthquake Engineering Research [MCEER] |
| 490 ## - SERIES STATEMENT |
|---|
| Series statement |
MCEER-99-0020, December 1, 1999 |
| 500 ## - GENERAL NOTE |
|---|
| General note |
This research was conducted at the University at Buffalo, State University of New York and was supported in whole or in part by the National Science Foundation under Grant No. CMS 97-01471 and other sponsors. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical Term |
Fabrication |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical Term |
Technical report |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Lee, G. C. |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Liang, Z. |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Song, J. W. |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Shen, J. D. |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Koha item type |
Books |
