| 000 -LEADER |
|---|
| fixed length control field |
00337nas a22000977a 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
170117s9999 xx 000 0 und d |
| 022 ## - INTERNATIONAL STANDARD SERIAL NUMBER |
|---|
| International Standard Serial Number |
1369-8001 |
| 245 ## - TITLE STATEMENT |
|---|
| Title |
Materials Science in Semiconductor Processing |
| Medium |
[e-journal] |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Name of publisher, distributor, etc. |
Elsevier |
| 856 ## - ELECTRONIC LOCATION AND ACCESS |
|---|
| Uniform Resource Identifier |
http://www.sciencedirect.com/science/journal/13698001 |
| Link text |
eSS consortium 1998 - Current |
