| 000 -LEADER |
|---|
| fixed length control field |
00794 a2200229 4500 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
3908450829 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.38152 |
| Item number |
IN82 |
| 245 1# - TITLE STATEMENT |
|---|
| Title |
GETTERING AND DEFECT ENGINEERING IN SEMICONDUCTOR TECHNOLOGY, GADEST 2003 |
| Statement of responsibility, etc. |
INTERNATIONAL AUTUMN MEETING ON GETTERING AND DEFECT ENGINEERING IN SEMICONDUCTOR TECHNOLOGY(10TH: 2003: BRANDENBURG, GERMANY |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
|
| Name of publisher, distributor, etc. |
Scitec Publications Ltd., Switzerland |
| Date of publication, distribution, etc. |
2004 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xvi,682 |
| 440 ## - SERIES STATEMENT/ADDED ENTRY--TITLE |
|---|
| Title |
Solid State Phenomena, Part B Of"Diffusion And Defect Data" |
| Volume/sequential designation |
|
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Semiconductors -- Congresses |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Getters -- Congresses |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Silicon Crystals -- Defects -- Congresses |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Richter,H. |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
|
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Kittler,M. |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
|
| 906 ## - LOCAL DATA ELEMENT F, LDF (RLIN) |
|---|
| h |
0 |
| 964 ## - |
|---|
| -- |
CIRC |
| 997 ## - |
|---|
| -- |
A151260 s C |
