| 000 -LEADER |
|---|
| fixed length control field |
00700 a2200229 4500 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
0819449768 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.381 |
| Item number |
SM25C |
| 245 1# - TITLE STATEMENT |
|---|
| Title |
SMART SENSORS, ACTUATORS, AND MEMS |
| Statement of responsibility, etc. |
PROCEEDINGS ON SMART SENSORS, ACTUATORS, AND MEMS (2003 : FLORIDA) |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
|
| Name of publisher, distributor, etc. |
Spie-The International Soc. For Optical Engg., Washington |
| Date of publication, distribution, etc. |
2003 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xii,928 |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Microelectrochemical Systems -- Congresses |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Microtechnology -- Congresses |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Chiao,Jung-Chih,Varadan,Vijay K |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
|
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Cane,Carles |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
|
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Jung-Chih Chiao,Vijay K Varadan,Carles Cane |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
|
| 906 ## - LOCAL DATA ELEMENT F, LDF (RLIN) |
|---|
| h |
0 |
| 964 ## - |
|---|
| -- |
CIRC |
| 997 ## - |
|---|
| -- |
A145957 s C |
