| 000 -LEADER |
|---|
| fixed length control field |
00550 a2200181 4500 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
390845039X |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.38152 |
| Item number |
IN8 |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
M No Kittler |
| 245 1# - TITLE STATEMENT |
|---|
| Title |
BEAM INJECTION ASESSMENT OF DEFECTS IN SEMICONDUCTORS |
| Statement of responsibility, etc. |
INTERNATIONAL WORKSHOP ON BEAM INJECTION ASSESSMENT OF DEFECTS IN SEMICONDUCTORS(5TH:1998:BERLIN) |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
|
| Name of publisher, distributor, etc. |
Scitech Publishing,Mendham, N.J. |
| Date of publication, distribution, etc. |
1998 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xiv,537 |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Semiconductors -- Congresses |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Kittler,M |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
|
| 906 ## - LOCAL DATA ELEMENT F, LDF (RLIN) |
|---|
| h |
0 |
| 964 ## - |
|---|
| -- |
CIRC |
| 997 ## - |
|---|
| -- |
A129623 s C |
