000 -LEADER |
fixed length control field |
00690 a2200205 4500 |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
International Standard Book Number |
1558994319 |
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
Classification number |
621.38152 |
Item number |
SY68O |
100 ## - MAIN ENTRY--PERSONAL NAME |
Personal name |
Mehmet C. Ozturk |
245 1# - TITLE STATEMENT |
Title |
RAPID THERMAL AND INTEGRATED PROCESSING VII |
Statement of responsibility, etc. |
SYMPOSIUM ON RAPID THERMAL AND INTEGRATED PROCESSING VII (1998 : SAN FRANCISCO, CALIFORNIA) |
260 ## - PUBLICATION, DISTRIBUTION, ETC. |
Place of publication, distribution, etc. |
|
Name of publisher, distributor, etc. |
Materials Research Society,Warrendale |
Date of publication, distribution, etc. |
1998 |
300 ## - PHYSICAL DESCRIPTION |
Extent |
xiii,403 |
440 ## - SERIES STATEMENT/ADDED ENTRY--TITLE |
Title |
Meterials Research Society Symposium Proceedings |
Volume/sequential designation |
|
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name entry element |
Semiconductors -- Heat Treatment -- Congresses |
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name entry element |
Semiconductors Doping -- Congresses |
700 ## - ADDED ENTRY--PERSONAL NAME |
Personal name |
Ozturk,Mehmet C. |
700 ## - ADDED ENTRY--PERSONAL NAME |
Personal name |
|
906 ## - LOCAL DATA ELEMENT F, LDF (RLIN) |
h |
0 |
964 ## - |
-- |
CIRC |
997 ## - |
-- |
A128539 s C |