| 000 -LEADER |
|---|
| fixed length control field |
00519 a2200169 4500 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
0444884297 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.38152 |
| Item number |
In8d |
| 245 1# - TITLE STATEMENT |
|---|
| Title |
DEFECT CONTROL IN SEMICONDUCTORS |
| Statement of responsibility, etc. |
INTERNATIONAL CONFERENCE ON THE SCIENCE AND TECHNOLOGY OF DEFECT CONTROL IN SEMICONDUCTORS (1989 : YOKOHAMA, JAPAN) |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
Amsterdam |
| Name of publisher, distributor, etc. |
North-Holland |
| Date of publication, distribution, etc. |
1990 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
2 v. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Semiconductors -- Defects -- Cong |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Sumino, K. |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
|
| 906 ## - LOCAL DATA ELEMENT F, LDF (RLIN) |
|---|
| h |
1989 |
| 964 ## - |
|---|
| -- |
CIRC |
| 997 ## - |
|---|
| -- |
A111108 v. 1 s C |
