| 000 -LEADER |
|---|
| fixed length control field |
00346 a2200145 4500 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.38152 |
| Item number |
In8i |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Chernov, Fred |
| 245 1# - TITLE STATEMENT |
|---|
| Title |
ION IMPLANTATION IN SEMICONDUCTORS, 1976 |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
New York |
| Name of publisher, distributor, etc. |
Plenum Press |
| Date of publication, distribution, etc. |
c1977 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xiv,754 |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Borders, James A. |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
|
| 964 ## - |
|---|
| -- |
CIRC |
| 997 ## - |
|---|
| -- |
A57523 s C |
