| 000 -LEADER |
|---|
| fixed length control field |
00375 a2200133 4500 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
537.622 |
| Item number |
In8 |
| 245 1# - TITLE STATEMENT |
|---|
| Title |
ION IMPLANTATION IN SEMICONDUCTORS AND OTHER MATERIALS |
| Statement of responsibility, etc. |
PROCEEDINGS |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
New York |
| Name of publisher, distributor, etc. |
Plenum Press |
| Date of publication, distribution, etc. |
1973 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
657 |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Ion Implantation -- Congresses |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Semiconductors -- Congresses |
| 964 ## - |
|---|
| -- |
CIRC |
| 997 ## - |
|---|
| -- |
A32501 C |
