| 000 -LEADER |
|---|
| fixed length control field |
00492 a2200169 4500 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
661.0683 |
| Item number |
Sy68 |
| 245 1# - TITLE STATEMENT |
|---|
| Title |
SILICON DEVICE PROCESSING |
| Statement of responsibility, etc. |
SYMPOSIUM ON SILICON DEVICE PROCESSING (1970 : GAITHERSBURG) |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
Washington |
| Name of publisher, distributor, etc. |
National Bureau Of Standards |
| Date of publication, distribution, etc. |
1970 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
457 |
| 440 ## - SERIES STATEMENT/ADDED ENTRY--TITLE |
|---|
| Title |
National Bureau Of Standards Special Publication |
| Volume/sequential designation |
337 |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Silicon |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Marsden, Charles P. |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
|
| 906 ## - LOCAL DATA ELEMENT F, LDF (RLIN) |
|---|
| h |
1970 |
| 964 ## - |
|---|
| -- |
CIRC |
| 997 ## - |
|---|
| -- |
A14880 s C |
